Research group for advanced recycling of silicon sludge Sludge
Success in deep utilization of silicon waste generated from the manufacturing process for semiconductors!
- Research Group No.
- 08R67
- Research Year
- 2008-2009
- Research Leader
- シナジーテック株式会社
- Research Members
- 東芝LSIパッケージソリューション株式会社、株式会社ユアサメンブレンシステム、電気化学工業株式会社、九州工業大学（高須准教授）
- Research Results
- Development of technology to recover sludge containing high purity silicon without using flocculant by separating waste water containing silicon grinding waste from the semiconductor manufacturing process and combining solid-liquid separation devices using membranes.
- Related Links